Inventor
ARNDT RUSSELL H
US13 patents
⚠️ This page may combine multiple inventors who share the name “ARNDT RUSSELL H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS6060388AMay 9, 2000
Conductors for microelectronic circuits and method of manufacture
IBM20 citations90
US9496371B1Nov 15, 2016
Channel protection during fin fabrication
IBM7 citations84
US6354309B1Mar 12, 2002
Process for treating a semiconductor substrate
IBM13 citations69
US6173720B1Jan 16, 2001
Process for treating a semiconductor substrate
IBM7 citations69
US10074562B2Sep 11, 2018
Self aligned contact structure
IBM1 citations61
US7015140B2Mar 21, 2006
Selective salicidation methods
IBM2 citations60
US6565666B1May 20, 2003
Capillary dry process and apparatus
IBM6 citations60
US9406683B2Aug 2, 2016
Wet bottling process for small diameter deep trench capacitors
IBM1 citations52
US9548244B2Jan 17, 2017
Self-aligned contact structure
IBM0 citations51
US9252053B2Feb 2, 2016
Self-aligned contact structure
IBM0 citations51
US8021945B2Sep 20, 2011
Bottle-shaped trench capacitor with enhanced capacitance
IBM1 citations50
US6508014B2Jan 21, 2003
Method of drying substrates
IBM0 citations48