Inventor
GALE GLENN WALTON
US4 patents
Patents
4 patentsUS6354309B1Mar 12, 2002
Process for treating a semiconductor substrate
IBM13 citations69
US6173720B1Jan 16, 2001
Process for treating a semiconductor substrate
IBM7 citations69
US6565666B1May 20, 2003
Capillary dry process and apparatus
IBM6 citations60
US6508014B2Jan 21, 2003
Method of drying substrates
IBM0 citations48