Inventor
KROEKER TONY R
US13 patents
⚠️ This page may combine multiple inventors who share the name “KROEKER TONY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6390448B1May 21, 2002
Single shaft dual cradle vacuum slot valve
LAM RES CORP61 citations95
US6095741AAug 1, 2000
Dual sided slot valve and method for implementing the same
LAM RES CORP77 citations95
US6564818B2May 20, 2003
Methods of implementing a single shaft, dual cradle vacuum slot valve
LAM RES CORP17 citations92
US6244811B1Jun 12, 2001
Atmospheric wafer transfer module with nest for wafer transport robot
LAM RES CORP36 citations89
US6601824B2Aug 5, 2003
Single shaft, dual cradle vacuum slot valve
LAM RES CORP13 citations83
US7682462B2Mar 23, 2010
Cluster tool process chamber having integrated high pressure and vacuum chambers
LAM RES CORP3 citations62
US7445015B2Nov 4, 2008
Cluster tool process chamber having integrated high pressure and vacuum chambers
LAM RES CORP4 citations62
APPLIED MATERIALS INC
5 patentsUS6494670B2Dec 17, 2002
Three chamber load lock apparatus
APPLIED MATERIALS INC39 citations95
US6000227ADec 14, 1999
Wafer cooling in a transfer chamber of a vacuum processing system
APPLIED MATERIALS INC57 citations95
US5961269AOct 5, 1999
Three chamber load lock apparatus
APPLIED MATERIALS INC54 citations95
US6250869B1Jun 26, 2001
Three chamber load lock apparatus
APPLIED MATERIALS INC33 citations92
US6056504AMay 2, 2000
Adjustable frog-leg robot
APPLIED MATERIALS INC14 citations74