Inventor
TOMASCH GREGORY A
US11 patents
⚠️ This page may combine multiple inventors who share the name “TOMASCH GREGORY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6390448B1May 21, 2002
Single shaft dual cradle vacuum slot valve
LAM RES CORP61 citations95
US6913243B1Jul 5, 2005
Unitary slot valve actuator with dual valves
LAM RES CORP46 citations94
US6564818B2May 20, 2003
Methods of implementing a single shaft, dual cradle vacuum slot valve
LAM RES CORP17 citations92
US7128305B2Oct 31, 2006
Unitary slot valve actuator with dual valves
LAM RES CORP14 citations91
US7059583B2Jun 13, 2006
Unitary slot valve actuator with dual valves
LAM RES CORP14 citations91
US6601824B2Aug 5, 2003
Single shaft, dual cradle vacuum slot valve
LAM RES CORP13 citations83
US6132513AOct 17, 2000
Process chemistry resistant manometer
LAM RES CORP8 citations69
KHOLODENKO ARNOLD
4 patentsUS8584613B2Nov 19, 2013
Single substrate processing head for particle removal using low viscosity fluid
KHOLODENKO ARNOLD2 citations60
US8557051B2Oct 15, 2013
Method for using generator for foam to clean substrate
KHOLODENKO ARNOLD0 citations51
US8161984B2Apr 24, 2012
Generator for foam to clean substrate
KHOLODENKO ARNOLD1 citations51
US8739805B2Jun 3, 2014
Confinement of foam delivered by a proximity head
KHOLODENKO ARNOLD0 citations38