Inventor
WANG LUPING
US30 patents
⚠️ This page may combine multiple inventors who share the name “WANG LUPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
25 patentsUS7437060B2Oct 14, 2008
Delivery systems for efficient vaporization of precursor source material
ADVANCED TECH MATERIALS561 citations99
US6909839B2Jun 21, 2005
Delivery systems for efficient vaporization of precursor source material
ADVANCED TECH MATERIALS610 citations99
US6101816AAug 15, 2000
Fluid storage and dispensing system
ADVANCED TECH MATERIALS157 citations99
US6089027AJul 18, 2000
Fluid storage and dispensing system
ADVANCED TECH MATERIALS216 citations99
US6660063B2Dec 9, 2003
Sorbent-based gas storage and delivery system
ADVANCED TECH MATERIALS85 citations98
US6620256B1Sep 16, 2003
Non-plasma in-situ cleaning of processing chambers using static flow methods
ADVANCED TECH MATERIALS80 citations98
US6343476B1Feb 5, 2002
Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
ADVANCED TECH MATERIALS94 citations98
US7105037B2Sep 12, 2006
Semiconductor manufacturing facility utilizing exhaust recirculation
ADVANCED TECH MATERIALS39 citations96
US6561213B2May 13, 2003
Fluid distribution system and process, and semiconductor fabrication facility utilizing same
ADVANCED TECH MATERIALS93 citations96
US6857447B2Feb 22, 2005
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
ADVANCED TECH MATERIALS44 citations95
US6360546B1Mar 26, 2002
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
ADVANCED TECH MATERIALS69 citations95
US6453924B1Sep 24, 2002
Fluid distribution system and process, and semiconductor fabrication facility utilizing same
ADVANCED TECH MATERIALS72 citations94
US6740586B1May 25, 2004
Vapor delivery system for solid precursors and method of using same
ADVANCED TECH MATERIALS36 citations93
US6620225B2Sep 16, 2003
Adsorbents for low vapor pressure fluid storage and delivery
ADVANCED TECH MATERIALS43 citations93
US6083298AJul 4, 2000
Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
ADVANCED TECH MATERIALS33 citations93
US7798168B2Sep 21, 2010
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
ADVANCED TECH MATERIALS12 citations92
US7485169B2Feb 3, 2009
Semiconductor manufacturing facility utilizing exhaust recirculation
ADVANCED TECH MATERIALS19 citations92
US6805728B2Oct 19, 2004
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
ADVANCED TECH MATERIALS47 citations92
US6474076B2Nov 5, 2002
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
ADVANCED TECH MATERIALS25 citations92
US6592653B2Jul 15, 2003
Fluid storage and delivery system utilizing low heels carbon sorbent medium
ADVANCED TECH MATERIALS65 citations91
US7048785B2May 23, 2006
Adsorbents for low vapor pressure fluid storage and delivery
ADVANCED TECH MATERIALS19 citations89
US6716271B1Apr 6, 2004
Apparatus and method for inhibiting decomposition of germane
ADVANCED TECH MATERIALS34 citations89
US7857880B2Dec 28, 2010
Semiconductor manufacturing facility utilizing exhaust recirculation
ADVANCED TECH MATERIALS7 citations74
US7614421B2Nov 10, 2009
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
ADVANCED TECH MATERIALS5 citations73
US7328716B2Feb 12, 2008
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
ADVANCED TECH MATERIALS6 citations73