Inventor

OLANDER W KARL

US36 patents

⚠️ This page may combine multiple inventors who share the name “OLANDER W KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OLANDER W KARL

ADVANCED TECH MATERIALS

Fluid storage and delivery system utilizing carbon sorbent medium

Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate

Sorbent-based gas storage and delivery system

Fluid storage and delivery system comprising high work capacity physical sorbent

Semiconductor manufacturing facility utilizing exhaust recirculation

Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means

Manufacturing process for gas source and dispensing systems

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

Fluid storage and dispensing systems, and fluid supply processes comprising same

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

Semiconductor manufacturing facility utilizing exhaust recirculation

Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases

Integrated system and process for effluent abatement and energy generation

System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers

Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

Apparatus and method for the in-situ generation of dopants

Air management system and method for chemical containment and contamination reduction in a semiconductor manufacturing facility

Ion implantation and wet bench systems utilizing exhaust gas recirculation

Gas cabinet assembly comprising back migration scrubber unit

Methods for cleaning ion implanter components

Semiconductor manufacturing facility utilizing exhaust recirculation

Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate

Precursor compositions for ion implantation of antimony and ion implantation process utilizing same

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

OLANDER W KARL

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

Fluid storage and dispensing systems, and fluid supply processes comprising same

Ventilation gas management systems and processes

ATMI ECOSYS CORP

Point-of-use catalytic oxidation apparatus and method for treatment of voc-containing gas streams

Process for removing and recovering halocarbons from effluent process streams

ENTEGRIS INC

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

Ion implanter comprising integrated ventilation system

DIMEO FRANK

Cleaning of semiconductor processing systems

APPLIED MATERIALS INC

Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

SWEENEY JOSEPH D

Ion source cleaning in semiconductor processing systems