Inventor · disambiguated record
Carol M. Heller
Also filed as: HELLER CAROL M
2 granted patents·194 citations·filing 1995–1995
70Inventor score
Files withVARIAN ASSOCIATES2
Top patents by PatentIndex Score
2 records- 0193US5656123ADual-frequency capacitively-coupled plasma reactor for materials processingVARIAN ASSOCIATES·Filed 1995·Granted Aug 12, 1997·156 cites·8 claims
- 0280US5716485AElectrode designs for controlling uniformity profiles in plasma processing reactorsVARIAN ASSOCIATES·Filed 1995·Granted Feb 10, 1998·38 cites·32 claims
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