Inventor

MCCAFFERTY DIANE

US3 patents

⚠️ This page may combine multiple inventors who share the name “MCCAFFERTY DIANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEWELL HARRY

2 patents

US8629970B2Jan 14, 2014

Immersion lithographic apparatus with immersion fluid re-circulating system

SEWELL HARRY5 citations71

US8451422B2May 28, 2013

Re-flow and buffer system for immersion lithography

SEWELL HARRY0 citations39

ASML HOLDING B V

1 patent

US7684014B2Mar 23, 2010

Lithographic apparatus and device manufacturing method

ASML HOLDING B V5 citations54