Inventor
YADAV SANJAY
US18 patents
⚠️ This page may combine multiple inventors who share the name “YADAV SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6825134B2Nov 30, 2004
Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow
APPLIED MATERIALS INC595 citations99
US7183197B2Feb 27, 2007
Water-barrier performance of an encapsulating film
APPLIED MATERIALS INC73 citations97
US6857387B1Feb 22, 2005
Multiple frequency plasma chamber with grounding capacitor at cathode
APPLIED MATERIALS INC92 citations96
US7214600B2May 8, 2007
Method to improve transmittance of an encapsulating film
APPLIED MATERIALS INC37 citations92
US6843258B2Jan 18, 2005
On-site cleaning gas generation for process chamber cleaning
APPLIED MATERIALS INC17 citations92
US7504332B2Mar 17, 2009
Water-barrier performance of an encapsulating film
APPLIED MATERIALS INC18 citations84
US6960263B2Nov 1, 2005
Shadow frame with cross beam for semiconductor equipment
APPLIED MATERIALS INC10 citations74
US6981508B2Jan 3, 2006
On-site cleaning gas generation for process chamber cleaning
APPLIED MATERIALS INC4 citations63
US8002896B2Aug 23, 2011
Shadow frame with cross beam for semiconductor equipment
APPLIED MATERIALS INC1 citations52
US6896929B2May 24, 2005
Susceptor shaft vacuum pumping
APPLIED MATERIALS INC0 citations52