Inventor
LUONG TONY
US6 patents
Patents
6 patentsUS6896586B2May 24, 2005
Method and apparatus for heating polishing pad
LAM RES CORP26 citations89
US6896600B1May 24, 2005
Liquid dispense manifold for chemical-mechanical polisher
LAM RES CORP16 citations82
US6712670B2Mar 30, 2004
Method and apparatus for applying downward force on wafer during CMP
LAM RES CORP7 citations72
US6666755B1Dec 23, 2003
Belt wiper for a chemical mechanical planarization system
LAM RES CORP9 citations68
US6761626B2Jul 13, 2004
Air platen for leading edge and trailing edge control
LAM RES CORP3 citations62
US7018276B2Mar 28, 2006
Air platen for leading edge and trailing edge control
LAM RES CORP0 citations51