Inventor

WANG SHAO-HUA

TW29 patents

⚠️ This page may combine multiple inventors who share the name “WANG SHAO-HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WANG SHAO-HUA

TAIWAN SEMICONDUCTOR MFG CO LTD

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Lithography system and method thereof

Highly efficient automatic particle cleaner method for EUV systems

Semiconductor processing tool and methods of operation

Detection using semiconductor detector

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Extreme ultraviolet photolithography method

Droplet generator assembly and method for using the same and radiation source apparatus

Lithography system and method thereof

Extreme ultraviolet photolithography system and method

Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit

Highly efficient automatic particle cleaner method for EUV systems

Lithography system and method thereof

Semiconductor processing tool and methods of operation

Lithography system and method thereof

Lithography system and method thereof

Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator

Processing apparatus, ion implantation apparatus and ion implantation method

Multi-platen ion implanter and method for implanting multiple substrates simultaneously

WANG SHAO-HUA

Cap assembly structure with various accessories

Bicycle pump

Lamp-set structure

Hip training apparatus

Swimming aid with webbed finger sheaths

TAIWAN SEMICONDUCTOR MFG

Dopant implantation method using multi-step implants

Processing apparatus and ion implantation apparatus

(unassigned)

Acupuncture device

FUKUI PREC COMPONENT SHENZHEN

Flexible printed circuit board and method for making same