Inventor

DALVIE MANOJ

US2 patents

⚠️ This page may combine multiple inventors who share the name “DALVIE MANOJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US5505780AApr 9, 1996

High-density plasma-processing tool with toroidal magnetic field

IBM142 citations93

(unassigned)

1 patent

US5716486AFeb 10, 1998

Method and apparatus for tuning field for plasma processing using corrected electrode

38 citations88