Inventor
PORNSIN-SIRIRAK NICHOLAS
US2 patents
Patents
2 patentsUS7074723B2Jul 11, 2006
Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system
APPLIED MATERIALS INC18 citations90
US7618548B2Nov 17, 2009
Silicon-containing structure with deep etched features, and method of manufacture
APPLIED MATERIALS INC7 citations71