Inventor

SORENSEN CARL

US7 patents

⚠️ This page may combine multiple inventors who share the name “SORENSEN CARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US7518466B2Apr 14, 2009

Methods and apparatus for symmetrical and/or concentric radio frequency matching networks

APPLIED MATERIALS INC63 citations97

US7083702B2Aug 1, 2006

RF current return path for a large area substrate plasma reactor

APPLIED MATERIALS INC60 citations94

US8004293B2Aug 23, 2011

Plasma processing chamber with ground member integrity indicator and method for using the same

APPLIED MATERIALS INC15 citations83

US8365682B2Feb 5, 2013

Methods and apparatus for supporting substrates

APPLIED MATERIALS INC5 citations73

APPLIED KOMATSU TECHNOLOGY INC

1 patent

US6024044AFeb 15, 2000

Dual frequency excitation of plasma for film deposition

APPLIED KOMATSU TECHNOLOGY INC184 citations97

BLONIGAN WENDELL

1 patent

US8062717B2Nov 22, 2011

RF current return path for a large area substrate plasma reactor

BLONIGAN WENDELL12 citations78

WHITE JOHN M

1 patent

US8147614B2Apr 3, 2012

Multi-gas flow diffuser

WHITE JOHN M5 citations61