Inventor
SHIN HO SEON
US19 patents
⚠️ This page may combine multiple inventors who share the name “SHIN HO SEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS6258220B1Jul 10, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC443 citations98
US6357143B2Mar 19, 2002
Method and apparatus for heating and cooling substrates
APPLIED MATERIALS INC40 citations96
US6276072B1Aug 21, 2001
Method and apparatus for heating and cooling substrates
APPLIED MATERIALS INC58 citations96
US6635157B2Oct 21, 2003
Electro-chemical deposition system
APPLIED MATERIALS INC43 citations95
US6929774B2Aug 16, 2005
Method and apparatus for heating and cooling substrates
APPLIED MATERIALS INC19 citations92
US6658763B2Dec 9, 2003
Method for heating and cooling substrates
APPLIED MATERIALS INC27 citations92
US6477787B2Nov 12, 2002
Method and apparatus for heating and cooling substrates
APPLIED MATERIALS INC22 citations92
US6182376B1Feb 6, 2001
Degassing method and apparatus
APPLIED MATERIALS INC27 citations92
US7993485B2Aug 9, 2011
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC24 citations91
US7418978B2Sep 2, 2008
Methods and apparatus for providing fluid to a semiconductor device processing apparatus
APPLIED MATERIALS INC22 citations90
US7297047B2Nov 20, 2007
Bubble suppressing flow controller with ultrasonic flow meter
APPLIED MATERIALS INC10 citations83
US7497932B2Mar 3, 2009
Electro-chemical deposition system
APPLIED MATERIALS INC9 citations82
US7192494B2Mar 20, 2007
Method and apparatus for annealing copper films
APPLIED MATERIALS INC12 citations81
US6599368B1Jul 29, 2003
System architecture of semiconductor manufacturing equipment
APPLIED MATERIALS INC6 citations74
US6897146B2May 24, 2005
System architecture of semiconductor manufacturing equipment
APPLIED MATERIALS INC2 citations63