Inventor

BOETTIGER ULRICH C

US69 patents

⚠️ This page may combine multiple inventors who share the name “BOETTIGER ULRICH C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOETTIGER ULRICH C

MICRON TECHNOLOGY INC

Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers

Gapless microlens array and method of fabrication

Controlling lens shape in a microlens array

Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrate

Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers

Gapless microlens array and method of fabrication

Method and apparatus for balancing color response of imagers

Controlling lens shape in a microlens array

Apparatus and method for manufacturing tilted microlenses

Methods of forming openings, and methods of forming container capacitors

Microelectronic imagers with curved image sensors and methods for manufacturing microelectronic imagers

Methods of forming openings, and methods of forming container capacitors

Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates

Method and apparatus for irradiating a microlithographic substrate

Methods of forming patterned compositions

Method for controlling radiation beam intensity directed to microlithographic substrates

Method and apparatus for irradiating a microlithographic substrate

Method and device for improved lithographic critical dimension control

Method for improved lithographic critical dimension control

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Method and apparatus to improve filter characteristics of optical filters

Methods to make sidewall light shields for color filter array

Multiple microlens system for image sensors or display

Imager with tuned color filter

Gapless microlens array and method of fabrication

Micro-lenses for imagers

Apparatus and method for manufacturing positive or negative microlenses

Ellipsoidal gapless microlens array and method of fabrication

Micro-lenses and structures for increasing area coverage and controlling shape of micro-lenses

Method and device for improved lithographic critical dimension control

Color filter array, imagers and systems having same, and methods of fabrication and use thereof

Tetraform microlenses and method of forming the same

Structure and method for FPN reduction in imaging devices

APTINA IMAGING CORP

Uniform color filter arrays in a moat

Ellipsoidal gapless micro lenses for imagers

Structure and method for building a light tunnel for use with imaging devices

Microelectronic imagers with shaped image sensors and methods for manufacturing microelectronic imagers

Configurable pixel array system and method

Method and apparatus providing imager pixel array with grating structure and imager device containing the same

Gapless microlens array and method of fabrication

Method and apparatus for reducing microlens surface reflection

Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers

Controlling lens shape in a microlens array

IBM

Method for forming a photoresist pattern and apparatus applicable therewith

Method for forming a photoresist pattern and apparatus applicable therewith

LI JIN

Method for forming imagers

BOETTIGER ULRICH C

Micro-lenses for CMOS imagers and method for manufacturing micro-lenses