Inventor
LEE TE-HSI TERRENCE
US8 patents
Patents
8 patentsUS9075079B2Jul 7, 2015
Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation
MCUBE INC7 citations82
US9249012B2Feb 2, 2016
Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures
MCUBE INC6 citations81
US9379733B1Jun 28, 2016
Synchronous modulation resonator with sigma delta modulator
MCUBE INC5 citations70
US10267636B1Apr 23, 2019
Method to test the quality factor of a MEMS gyroscope at chip probe
MCUBE INC4 citations68
US10322926B1Jun 18, 2019
MEMS device with reduced dynamic stress and methods
MCUBE INC1 citations60
US10046964B2Aug 14, 2018
MEMS structure with improved shielding and method
MCUBE INC0 citations50
US9950921B2Apr 24, 2018
MEMS structure with improved shielding and method
MCUBE INC0 citations50
US10343896B2Jul 9, 2019
Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures
MCUBE INC0 citations49