Inventor
REN DAXING
US9 patents
⚠️ This page may combine multiple inventors who share the name “REN DAXING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7247579B2Jul 24, 2007
Cleaning methods for silicon electrode assembly surface contamination removal
LAM RES CORP19 citations92
US6846726B2Jan 25, 2005
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
LAM RES CORP18 citations89
US7498269B2Mar 3, 2009
Cleaning methods for silicon electrode assembly surface contamination removal
LAM RES CORP9 citations83
US6780569B1Aug 24, 2004
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains
LAM RES CORP13 citations83
US7442114B2Oct 28, 2008
Methods for silicon electrode assembly etch rate and etch uniformity recovery
LAM RES CORP14 citations82
US7267741B2Sep 11, 2007
Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon
LAM RES CORP17 citations82
US7517803B2Apr 14, 2009
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
LAM RES CORP7 citations70