Inventor
NELSON MICHAEL LEO
US3 patents
Patents
3 patentsUS10324383B2Jun 18, 2019
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV5 citations79
USRE49066EMay 10, 2022
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV0 citations59
US12399000B2Aug 26, 2025
Systems and methods for measuring intensity in a lithographic alignment apparatus
ASML HOLDING NV0 citations48