Inventor
CHIEDA MICHAEL ANDREW
US4 patents
Patents
4 patentsUS10324383B2Jun 18, 2019
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV5 citations79
US11500298B2Nov 15, 2022
Reticle sub-field thermal control
ASML HOLDING NV4 citations67
USRE49066EMay 10, 2022
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV0 citations59
US11048175B2Jun 29, 2021
Apparatus for and method cleaning a support inside a lithography apparatus
ASML HOLDING NV1 citations57