Inventor
TACHIMORI MASAHARU
JP4 patents
Patents
4 patentsUS5918151AJun 29, 1999
Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same
NIPPON STEEL CORP22 citations91
US5189508AFeb 23, 1993
Silicon wafer excelling in gettering ability and method for production thereof
NIPPON STEEL CORP15 citations70
US5534446AJul 9, 1996
Process for producing buried insulator layer in semiconductor substrate
NIPPON STEEL CORP12 citations69
US5373804ADec 20, 1994
Single silicon crystal having low OSF density induced by oxidation and method for production thereof
NIPPON STEEL CORP15 citations69