Inventor

MULLEE WILLIAM

US2 patents

Patents

2 patents

US6322600B1Nov 27, 2001

Planarization compositions and methods for removing interlayer dielectric films

ADVANCED TECH MATERIALS115 citations94

US6802983B2Oct 12, 2004

Preparation of high performance silica slurry using a centrifuge

ADVANCED TECH MATERIALS37 citations87