Inventor

PENMETHSA HARISH

US2 patents

Patents

2 patents

US11881427B2Jan 23, 2024

Substrate flipping in vacuum for dual sided PVD sputtering

APPLIED MATERIALS INC2 citations65

US11948784B2Apr 2, 2024

Tilted PVD source with rotating pedestal

APPLIED MATERIALS INC1 citations58