Inventor
SHAH NITIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “SHAH NITIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6053801AApr 25, 2000
Substrate polishing with reduced contamination
APPLIED MATERIALS INC58 citations93
US6251001B1Jun 26, 2001
Substrate polishing with reduced contamination
APPLIED MATERIALS INC21 citations90
US6572730B1Jun 3, 2003
System and method for chemical mechanical planarization
APPLIED MATERIALS INC15 citations82