Inventor
DELAURENTIS ERIC
US2 patents
Patents
2 patentsUS6723214B2Apr 20, 2004
Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system
APPLIED MATERIALS INC22 citations90
US7163607B2Jan 16, 2007
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system
APPLIED MATERIALS INC10 citations82