Inventor

TAI CHIA-MING

TW2 patents

Patents

2 patents

US9478444B2Oct 25, 2016

Mechanisms for cleaning wafer and scrubber

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations66

US9324559B2Apr 26, 2016

Thin film deposition apparatus with multi chamber design and film deposition methods

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48