Inventor

SUBKE KAI-OLAF

DE2 patents

Patents

2 patents

US7763520B2Jul 27, 2010

Capacitor device with a layer structure disposed in a meander-shaped manner

INFINEON TECHNOLOGIES AG5 citations58

US7799691B2Sep 21, 2010

System and method for anisotropically etching a recess in a silicon substrate

INFINEON TECHNOLOGIES AG0 citations27