Inventor

LETOURNEAU STEVEN PAYONK

US2 patents

Patents

2 patents

US11142824B2Oct 12, 2021

Method of producing thin layer of large area transition metal dichalcogenides MoS2 and others

UCHICAGO ARGONNE LLC3 citations68

US11257682B2Feb 22, 2022

Molecular layer etching

UCHICAGO ARGONNE LLC0 citations56