Inventor
SPINILLO GARY THOMAS
US3 patents
Patents
3 patentsUS6207787B1Mar 27, 2001
Antireflective coating for microlithography
IBM51 citations92
US5736301AApr 7, 1998
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used
IBM20 citations89
US5910337AJun 8, 1999
Phase-averaging resist coating for reflectivity control
IBM4 citations54