Inventor
FAHEY JAMES T
US14 patents
⚠️ This page may combine multiple inventors who share the name “FAHEY JAMES T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MAT
7 patentsUS7615335B2Nov 10, 2009
Imaging methods
ROHM & HAAS ELECT MAT15 citations92
US7722441B2May 25, 2010
Semiconductor processing
ROHM & HAAS ELECT MAT14 citations82
US7977026B2Jul 12, 2011
Imaging methods
ROHM & HAAS ELECT MAT4 citations73
US8048606B2Nov 1, 2011
Imaging methods
ROHM & HAAS ELECT MAT2 citations62
US8053160B2Nov 8, 2011
Imaging compositions and methods
ROHM & HAAS ELECT MAT1 citations52
US7749685B2Jul 6, 2010
Imaging methods
ROHM & HAAS ELECT MAT0 citations52
US7270932B2Sep 18, 2007
Imaging composition and method
ROHM & HAAS ELECT MAT1 citations48
IBM
4 patentsUS5554485ASep 10, 1996
Mid and deep-UV antireflection coatings and methods for use thereof
IBM56 citations95
US5401614AMar 28, 1995
Mid and deep-UV antireflection coatings and methods for use thereof
IBM68 citations95
US5607824AMar 4, 1997
Antireflective coating for microlithography
IBM61 citations94
US5547812AAug 20, 1996
Composition for eliminating microbridging in chemically amplified photoresists comprising a polymer blend of a poly(hydroxystyrene) and a copolymer made of hydroxystyrene and an acrylic monomer
IBM24 citations86