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Inventor
LECLERC MARK A
US
2 patents
Patents
2 patents
US6556280B1
Apr 29, 2003
Period reconfiguration and closed loop calibration of an interference lithography patterning system and method of operation
OPTICAL SWITCH CORP
64 citations
91
US6522433B2
Feb 18, 2003
Interference lithography using holey fibers
OPTICAL SWITCH CORP
20 citations
88