Inventor
KUMADA TERUHIKO
JP21 patents
⚠️ This page may combine multiple inventors who share the name “KUMADA TERUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
9 patentsUS6924240B2Aug 2, 2005
Low dielectric constant material, insulating film comprising the low dielectric constant material, and semiconductor device
MITSUBISHI ELECTRIC CORP24 citations92
US5100762AMar 31, 1992
Radiation-sensitive polymer and radiation-sensitive composition containing the same
MITSUBISHI ELECTRIC CORP22 citations91
US5204218AApr 20, 1993
Photosensitive resin composition
MITSUBISHI ELECTRIC CORP15 citations72
US6511792B2Jan 28, 2003
Developing process, process for forming pattern and process for preparing semiconductor device using same
MITSUBISHI ELECTRIC CORP7 citations66
US7030007B2Apr 18, 2006
Via-filling material and process for fabricating semiconductor integrated circuit using the material
MITSUBISHI ELECTRIC CORP3 citations61
US5981146ANov 9, 1999
Resist coating film
MITSUBISHI ELECTRIC CORP6 citations59
US8043678B2Oct 25, 2011
Radome and method of producing the same
MITSUBISHI ELECTRIC CORP3 citations56
US7824784B2Nov 2, 2010
Composition for low dielectric material, low dielectric material and method for production thereof
MITSUBISHI ELECTRIC CORP0 citations41
US6984473B2Jan 10, 2006
Method of patterning a mask blank
MITSUBISHI ELECTRIC CORP0 citations39