Inventor
RIVIERE REMI
DE3 patents
Patents
3 patentsUS9177874B2Nov 3, 2015
Method of forming a semiconductor device employing an optical planarization layer
GLOBALFOUNDRIES INC4 citations66
US10161915B2Dec 25, 2018
In-situ contactless monitoring of photomask pellicle degradation
GLOBALFOUNDRIES INC1 citations46
US9798244B2Oct 24, 2017
Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity
GLOBALFOUNDRIES INC0 citations33