Inventor
OKUMURA MIKA
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OKUMURA MIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
13 patentsUS7900515B2Mar 8, 2011
Acceleration sensor and fabrication method thereof
MITSUBISHI ELECTRIC CORP3 citations62
US7533570B2May 19, 2009
Electrostatic-capacitance-type acceleration sensor
MITSUBISHI ELECTRIC CORP5 citations61
US7041593B2May 9, 2006
Method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations61
US6958529B2Oct 25, 2005
Acceleration sensor and method of manufacture thereof
MITSUBISHI ELECTRIC CORP6 citations61
US6905905B2Jun 14, 2005
Method of manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations61
US6900071B2May 31, 2005
Substrate and method for producing the same, and thin film structure
MITSUBISHI ELECTRIC CORP4 citations61
US6812568B2Nov 2, 2004
Electrode structure, and method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP3 citations61
US6784011B2Aug 31, 2004
Method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations57
US11459226B2Oct 4, 2022
Semiconductor device and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP0 citations51
US7495301B2Feb 24, 2009
Thin film accelerometer
MITSUBISHI ELECTRIC CORP0 citations50
US7094620B2Aug 22, 2006
Semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP1 citations50
US10252905B2Apr 9, 2019
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations40
US7371600B2May 13, 2008
Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations35
OKUMURA MIKA
3 patentsUS8390121B2Mar 5, 2013
Semiconductor device and method of manufacture thereof
OKUMURA MIKA16 citations82
US8304899B2Nov 6, 2012
Element wafer and method for manufacturing the same
OKUMURA MIKA0 citations48
US8618666B2Dec 31, 2013
Semiconductor device and method of manufacturing the same
OKUMURA MIKA0 citations39