Inventor
HORIKAWA MAKIO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “HORIKAWA MAKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
11 patentsUS7900515B2Mar 8, 2011
Acceleration sensor and fabrication method thereof
MITSUBISHI ELECTRIC CORP3 citations62
US7533570B2May 19, 2009
Electrostatic-capacitance-type acceleration sensor
MITSUBISHI ELECTRIC CORP5 citations61
US7041593B2May 9, 2006
Method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations61
US6958529B2Oct 25, 2005
Acceleration sensor and method of manufacture thereof
MITSUBISHI ELECTRIC CORP6 citations61
US6905905B2Jun 14, 2005
Method of manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations61
US6900071B2May 31, 2005
Substrate and method for producing the same, and thin film structure
MITSUBISHI ELECTRIC CORP4 citations61
US6812568B2Nov 2, 2004
Electrode structure, and method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP3 citations61
US6784011B2Aug 31, 2004
Method for manufacturing thin-film structure
MITSUBISHI ELECTRIC CORP2 citations57
US7495301B2Feb 24, 2009
Thin film accelerometer
MITSUBISHI ELECTRIC CORP0 citations50
US7094620B2Aug 22, 2006
Semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP1 citations50
US7371600B2May 13, 2008
Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations35