Inventor
SATOU KIMITOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SATOU KIMITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS5335550AAug 9, 1994
Semiconductor pressure sensor including multiple silicon substrates bonded together and method of producing the same
MITSUBISHI ELECTRIC CORP70 citations92
US7533570B2May 19, 2009
Electrostatic-capacitance-type acceleration sensor
MITSUBISHI ELECTRIC CORP5 citations61
US7495301B2Feb 24, 2009
Thin film accelerometer
MITSUBISHI ELECTRIC CORP0 citations50
US7094620B2Aug 22, 2006
Semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP1 citations50