Inventor

TAHARA FUMIO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “TAHARA FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU HANDOTAI KK

2 patents

US7713851B2May 11, 2010

Method of manufacturing silicon epitaxial wafer

SHINETSU HANDOTAI KK1 citations48

US9708726B2Jul 18, 2017

Silicon wafer heat treatment method

SHINETSU HANDOTAI KK0 citations46

OHTSUKI TSUYOSHI

2 patents

US8900971B2Dec 2, 2014

Bonded substrate and manufacturing method thereof

OHTSUKI TSUYOSHI0 citations45

US8877609B2Nov 4, 2014

Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate

OHTSUKI TSUYOSHI1 citations45

Qu wei feng

2 patents

US9606030B2Mar 28, 2017

Method for detecting crystal defects

Qu wei feng0 citations42

US8916953B2Dec 23, 2014

Method for manufacturing silicon single crystal wafer and annealed wafer

Qu wei feng1 citations38

TAHARA FUMIO

1 patent

US8551246B2Oct 8, 2013

Method for evaluating oxide dielectric breakdown voltage of a silicon single crystal wafer

TAHARA FUMIO0 citations32