Inventor

KOO ILWOONG

US2 patents

⚠️ This page may combine multiple inventors who share the name “KOO ILWOONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US9783884B2Oct 10, 2017

Method for implementing low dose implant in a plasma system

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations35

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US9142438B2Sep 22, 2015

Techniques for clamping and declamping a substrate

VARIAN SEMICONDUCTOR EQUIPMENT0 citations30