Inventor
TSUDA AKIYOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TSUDA AKIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
3 patentsUS6046459AApr 4, 2000
Method and system for charged particle beam exposure
FUJITSU LTD7 citations73
US5981118ANov 9, 1999
Method for charged particle beam exposure with fixed barycenter through balancing stage scan
FUJITSU LTD10 citations73
US5966200AOct 12, 1999
Charged particle beam exposure apparatus
FUJITSU LTD7 citations72
IBIDEN CO LTD
2 patentsADVANTEST CORP
2 patentsUS8779378B2Jul 15, 2014
Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector
ADVANTEST CORP0 citations51
US8859993B2Oct 14, 2014
Sample holder of electron beam exposure apparatus and electron beam exposure method using the same
ADVANTEST CORP0 citations48