Inventor

TSAI JEN-HANN

TW2 patents

Patents

2 patents

US6410386B1Jun 25, 2002

Method for forming a metal capacitor in a damascene process

SILICON INTEGRATED SYS CORP20 citations81

US6512260B2Jan 28, 2003

Metal capacitor in damascene structures

SILICON INTEGRATED SYS CORP8 citations71