Inventor · disambiguated record
Toru Hirabayashi
Also filed as: HIRABAYASHI TORU
1 granted patent·1 pending application·16 citations·filing 2001–2020
38Inventor score
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2 records- 0176US6714277B2Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Mar 30, 2004·16 cites·52 claims
- 0243US2022144653A1Reduction material, composite body and reduction methodUNIV TSUKUBA·Filed 2020·Application pending·0 cites
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