Inventor
DREXEL VOLKER
DE14 patents
⚠️ This page may combine multiple inventors who share the name “DREXEL VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL NTS GMBH
6 patentsUS7425701B2Sep 16, 2008
Electron-beam device and detector system
ZEISS CARL NTS GMBH20 citations90
US7462839B2Dec 9, 2008
Detector for variable pressure areas and an electron microscope comprising a corresponding detector
ZEISS CARL NTS GMBH26 citations85
US6872956B2Mar 29, 2005
Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device
ZEISS CARL NTS GMBH17 citations82
US7910887B2Mar 22, 2011
Electron-beam device and detector system
ZEISS CARL NTS GMBH4 citations71
US7507962B2Mar 24, 2009
Electron-beam device and detector system
ZEISS CARL NTS GMBH4 citations60
US7060978B2Jun 13, 2006
Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system
ZEISS CARL NTS GMBH4 citations60