Inventor

SHERBAK NIKOLAY

RU2 patents

⚠️ This page may combine multiple inventors who share the name “SHERBAK NIKOLAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US11262591B2Mar 1, 2022

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

KLA TENCOR CORP2 citations67

KLA CORP

1 patent

US11921297B2Mar 5, 2024

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

KLA CORP0 citations57