Inventor
KUGA YASUHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KUGA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6551448B2Apr 22, 2003
Heat processing apparatus of substrate
TOKYO ELECTRON LTD21 citations90
US11798821B2Oct 24, 2023
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations63
US11393702B2Jul 19, 2022
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD0 citations51
US12560383B2Feb 24, 2026
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD0 citations45