Inventor
KANEDA MASATOSHI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “KANEDA MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS6074154AJun 13, 2000
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD457 citations99
US7992318B2Aug 9, 2011
Heating apparatus, heating method, and computer readable storage medium
TOKYO ELECTRON LTD553 citations97
US6425722B1Jul 30, 2002
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD54 citations96
US6368776B1Apr 9, 2002
Treatment apparatus and treatment method
TOKYO ELECTRON LTD36 citations91
US6655891B2Dec 2, 2003
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD13 citations84
US7049553B2May 23, 2006
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD12 citations83
US7615117B2Nov 10, 2009
Coating and processing apparatus and method
TOKYO ELECTRON LTD10 citations82
US8893650B2Nov 25, 2014
Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium
TOKYO ELECTRON LTD3 citations62
US7431584B2Oct 7, 2008
Heat processing apparatus and heat processing method
TOKYO ELECTRON LTD2 citations62
US7151239B2Dec 19, 2006
Heat treating apparatus and heat treating method
TOKYO ELECTRON LTD2 citations62
US11443964B2Sep 13, 2022
Substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations61
US9514951B2Dec 6, 2016
Substrate processing method, substrate processing apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD2 citations61
US11837487B2Dec 5, 2023
Transfer device, substrate processing system, transfer method and substrate processing method
TOKYO ELECTRON LTD0 citations52
US9105519B2Aug 11, 2015
Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium
TOKYO ELECTRON LTD0 citations52
US9362150B2Jun 7, 2016
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations44