Inventor
KOSHIBA MITSUNOBU
JP3 patents
Patents
3 patentsUS4886565ADec 12, 1989
Reactive ion etching apparatus
JAPAN SYNTHETIC RUBBER CO LTD28 citations90
US4963463AOct 16, 1990
Radiation-sensitive resin composition with admixtures of O-quinone diazide and acid esters having nitrobenzyl or cyanobenzyl group
JAPAN SYNTHETIC RUBBER CO LTD39 citations89
US4957588ASep 18, 1990
Method for high temperature reaction process
JAPAN SYNTHETIC RUBBER CO LTD10 citations67