Inventor
HSU CHEN-SHAO
TW8 patents
Patents
8 patentsUS11687006B2Jun 27, 2023
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9017903B2Apr 28, 2015
Mask overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US8999611B2Apr 7, 2015
Mask blank for scattering effect reduction
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US12298673B2May 13, 2025
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12038693B2Jul 16, 2024
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11327405B2May 10, 2022
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10816892B2Oct 27, 2020
Method of manufacturing photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9377701B2Jun 28, 2016
Mask overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51