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Inventor
CHANG CHANG-CHIA
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHANG-CHIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHANG CHANG-CHIA
1 patent
US9139420B2
Sep 22, 2015
MEMS device structure and methods of forming same
CHANG CHANG-CHIA
49 citations
92
TAIWAN SEMICONDUCTOR MFG CO LTD
1 patent
US9802816B2
Oct 31, 2017
MEMS device structure and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD
0 citations
49