Inventor
IGARASHI MIWA
JP22 patents
⚠️ This page may combine multiple inventors who share the name “IGARASHI MIWA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
12 patentsUS6013416AJan 11, 2000
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD164 citations99
US5968713AOct 19, 1999
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD165 citations99
US6329125B2Dec 11, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD154 citations98
US6200725B1Mar 13, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD105 citations97
US5910392AJun 8, 1999
Resist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor device
FUJITSU LTD46 citations92
US6052261AApr 18, 2000
Method for manufacturing magnetoresistance head
FUJITSU LTD23 citations91
US5906912AMay 25, 1999
Processes for forming resist pattern and for producing semiconductor device
FUJITSU LTD20 citations90
US6200724B1Mar 13, 2001
Chemical amplification resist compositions and process for the formation of resist patterns
FUJITSU LTD16 citations84
US5962191AOct 5, 1999
Resist compositions for forming resist patterns
FUJITSU LTD11 citations74
US5824452AOct 20, 1998
Resist compositions and process for the formation of resist patterns
FUJITSU LTD7 citations74
US5804354ASep 8, 1998
Composition for forming conductivity imparting agent and pattern forming method
FUJITSU LTD8 citations73
US6582878B2Jun 24, 2003
Chemical amplification resist compositions and process for the formation of resist patterns
FUJITSU LTD3 citations63
GIGAPHOTON INC
7 patentsUS10916910B2Feb 9, 2021
Line narrowing module
GIGAPHOTON INC1 citations62
US9198273B2Nov 24, 2015
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC3 citations59
US11411364B2Aug 9, 2022
Line narrowing module, gas laser apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US9882334B2Jan 30, 2018
Mirror device
GIGAPHOTON INC0 citations52
US9179534B2Nov 3, 2015
Extreme ultraviolet light source apparatus
GIGAPHOTON INC1 citations52
US9894743B2Feb 13, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations51
US11978997B2May 7, 2024
Laser apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations48