Inventor

HAMMER DIETMAR

AT3 patents

⚠️ This page may combine multiple inventors who share the name “HAMMER DIETMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES AG

2 patents

US9972514B2May 15, 2018

Apparatus for liquid treatment of wafer shaped articles

LAM RES AG1 citations47

US10410888B2Sep 10, 2019

Device and method for removing liquid from a surface of a disc-like article

LAM RES AG0 citations32

BRUGGER MICHAEL

1 patent

US8608146B2Dec 17, 2013

Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin

BRUGGER MICHAEL14 citations79